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Primary level vacuum measurements are performed using a “Multi Stage Static Expansion System” (MESSE1) in the TÜBİTAK UME Vacuum Laboratory. Pressure range: 9 x 10-4 Pa - 103 Pa, relative uncertainty 2.1 x 10-3 - 9.5 x 10-4.

On the other hand, vacuum gauge calibrations needed by industry are performed using “Vacuum Gauge Metrology System” (VGMS). The relative uncertainty range for the calibrations between 1 x 10-4 Pa and 1.33 x 105 Pa is 8.3 x 10-2 Pa to -7.9 x 10-3 Pa.

The following types of vacuum gauges can be calibrated in the Vacuum Laboratory:

  • Pirani and Thermocouple vacuum gauges
  • Capacitance Diaphragm Manometers (CDG)
  • Hot and Cold Cathode Ionization vacuum gauges
  • Spinning Rotor Gauges (SRG)

UME Vacuum Laboratory has been accredited in 2005 by TÜRKAK (Turkish Accreditation Agency) in the following scope:


Calibration scope and calibrated gauges

Measurement Range

Calibration and Measurement Capability

(Expressed as an expanded uncertainty) (k=2), p in pascal

Absolute Pressure / Pa / Pirani and Thermocouple vacuum gauges

1 x 10-2 Pa – 1,3 x 105 Pa

4,1 x 10-2 x p – 7,0 x 10-3 x p

Absolute Pressure / Pa / Capacitance Diaphragm Manometers CDG)

1 x 10-2 Pa – 1,3 x 105 Pa

2,4 x 10-2 x p – 7,9 x 10-3 x p

Absolute Pressure / Pa / Hot and Cold Cathode Ionisation vacuum gauges

1 x 10-4 Pa – 1 x 10-1 Pa

1,1 x 10-1 x p – 3,0 x 10-2 x p

Absolute Pressure / Pa / Spinning Rotor Gauges (SRG)

1 x 10-4 Pa – 1 x 10-1 Pa

8,3 x 10-2 x p – 2,4 x 10-2 x p

Accreditation Scope Values


Quadruple Mass Spectrometer (QMS) is a kind of Residual Gas Analyser (RGA) that is used not only in industrial applications such as steel processing, medicine production, nuclear fuel production but also widely in scientific applications like high vacuum experiments and particle accelerators. Partial gas pressure measurements, determination of gas impurities and monitoring the vacuum conditions in vacuum chambers, determination of outgassing rate, processing and controlling can also be given as examples of QMS applications. QMS measurements in the mass range of 1 - 200 amu with the gasses of N2, Ar, He and CO2 have being performed at UME Vacuum Laboratory within the scope of European Metrology Research Project EMRP IND12 “Vacuum Metrology for Industrial Applications”.

As a second step of the European Metrology Research Project EMRP IND12 “Vacuum Metrology for Industrial Applications”, Mass Spectrometer Leak Detector (MSLD) characterisation determination measurements were performed and “He” leak standards made available in the Vacuum Laboratory. “He” leak calibrations between the range of 10-7 mbar·l/s - 10-2 mbar·l/s and MSLD characterization measurements will begin in 2015.