Vacuum Laboratory

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VACUUM LABORATORY

The main activities of the Vacuum Laboratory are conducted in four working areas: MSSE1 (Multi-Stage Static Expansion System) as the National Vacuum Standard, the secondary level vacuum calibration system, leak measurements and partial pressure measurements using a Quadrupole Mass Spectrometer.

All secondary-level vacuum gauge calibrations are performed on the secondary-level standard, the VGMS (Vacuum Gauge Metrology System), with a working pressure range of 10-4 Pa  to 1.3 x 105 Pa and relative uncertainty of 8.3 x 10-2 - 7.9 x 10-3. The traceability of the reference standards are provided through the primary level system. The pressure range of the primary system is between 9 x 10-4 Pa and 103 Pa, and the relative uncertainty is 2.1 x 10-3 - 9.5 x 10-4. The Primary Standard Static System has participated in an international intercomparison (EUROMET 442 A/B project).

As a partner in two joint research projects under the European Metrology Research Program, the laboratory has began working in areas such as leak standard measurements, stability measurements of leak detectors and quadrupole mass spectrometer, and the investigation of the effects of various parameters on the sensitivity of the spectrometer. Quadrupole mass spectrometer measurements are being performed on the Dynamic Vacuum System established in 2012. 

Vacuum Laboratory gives consultancy services about vacuum metrology, calibration methods, measurement techniques and uncertainty calculations. Also, it advises companies concerning the necessary technical criteria for the construction of laboratories and obtaining laboratory accreditations.

 

Vacuum Laboratory Traceability Chain

 

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