Laser Diffractometer for Calibration of Grating Pitch Standards

-A +A

It is possible to use the wave nature of light with optical gratings, that could be defined as structured surfaces in which the period of these structures is on the order of light wavelength in length and thus to transfer length unit meter as nanometer scale length standard to be used for metrological traceability of devices used in nanotechnology. Therefore, devices used for nanotechnology applications such as scanning probe microscopes, optical microscopes and scatterometer systems could be verified for their accuracy, and also, the unity of measurements of different devices could be achieved.

Based on optical difraction principle, laser diffractometer system enables calibration of such optical gratings and their placement in the metrological traceability chain.

 (Completed)