UME

Vacuum Laboratory

About Us

The Vacuum Laboratory serves in the field of vacuum measurement science. Its main purpose is to provide the pressure unit pascal (Pa), which is derived from the international system of units SI basic units, at the primary level with absolute pressure (vacuum) measurements. Its main tasks are to establish, maintain and develop the relevant vacuum measurement standards/systems, to be included in the international measurement system through international comparisons and to ensure traceability within the country with the services it provides.

The Vacuum Laboratory provides calibration services through a secondary level vacuum calibration system. It ensures its traceability independently from abroad through the primary level national vacuum standard multi-stage static expansion system it has established. The laboratory also performs secondary level calibrations (in vacuum mode) by determining the gas flow rates of helium leakage standards by comparison method. For gas flow rate determination measurements in vacuum at the primary level, constant pressure gas flow system (CPFM) performance analysis and characterization studies are ongoing at very low gas flows.

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Areas of Activity and Services

Main studies carried out:

The primary level national vacuum standard has been recognized by the European Union through international key comparisons (within the scope of EUROMET). Most recently, the vacuum laboratory participated in the EURAMET.M.P-K15.1 international key comparison (2020), received successful results, was recognized and maintained its reliability. As such, there is no foreign dependency in vacuum measurements and traceability is ensured within the laboratory.

Main sectors served:

  • Defense

  • Aviation

  • Space and Rocket Industry

  • Aircraft Maintenance

  • Military Electronics Industry

  • TSK

  • Pharmaceutical and Medical Technologies Industry

  • Precision Machining

  • Advanced Materials

  • Energy

  • White Goods

  • Gas

  • Tank

Calibration measurement capability:

  • Pirani, thermal conductivity and thermocouple type vacuum gauges
  • Capacitance diaphragm (CDG) manometers
  • Hot and cold cathode ionization vacuum gauges
  • Rotary rotor type (SRG) vacuum gauges
  • Dual vacuum meters (full range)
  • Permeable type helium leak standard (in vacuum)
Measurement Size and Calibrated Instruments Measurement Range Calibration and Measurement Capability (Extended Measurement Uncertainty k=2) , p (pascal)
Absolute pressure / Pa / Pirani, Thermal conductivity and Thermocouple type vacuum gauges 1 x 10-¹ Pa - 1 x 10⁵ Pa 4.1 x 10-² x p -2.0 x 10-² x p
Absolute pressure / Pa / Capacitance diaphragm manometer (CDG) 1 x 10-¹ Pa - 1 x 10⁵ Pa 3.5 x 10-² x p - 7.9 x 10-³ x p
Absolute pressure / Pa / Hot and Cold Cathode Ionization Vacuum Gauges 1 x 10-⁴ Pa - 1 x 10-¹ Pa 1.1 x 10-¹ x p - 4.0 x 10-² x p
Absolute pressure / Pa / Rotary Rotor Type (SRG) Vacuum Gauges 1 x 10-⁴ Pa - 1 x 10-¹ Pa 9.0 x 10-² x p - 3.5 x 10-² x p

* Our laboratory was accredited by TÜRKAK in 2005 in the scope given above in vacuum measurements.

Consulting services

Vacuum Laboratory provides training on vacuum metrology, calibration methods of vacuum gauges, measurement techniques and uncertainty calculations, and consultancy services on the technical requirements required by the relevant organizations during the laboratory establishment and laboratory accreditation phase. 

Services Provided

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Calibration / Testing Services

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Training Services

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Consulting Services

Technical Hardware and Equipment

Multistage Static Expansion System (MSSE1):

Primary level vacuum measurements, where traceability of reference standards is ensured, are carried out through the national vacuum standard "Multi-Stage Static Expansion System (MSSE1)". Operating range of the system is 9 x 10-4Pa - 103 Pa, relative expanded uncertainty 2.1 x 10-3 - 9,5 x 10-4 (Image 1)

Vacuum Gauge Calibration System (VGMS):

Vacuum gauge calibrations required by the industry are carried out through the Vacuum Gauge Metrology System (VGMS). 1 x 10 -4 Pa -1.33 x 105The relative uncertainty range for calibrations performed in the Pa operating range is 8.3 x 10-2 Pa -7.9 x 10-3 Pa. (Image 2)

Dynamic Vacuum System:

Within the scope of the EMRP IND12 "Vacuum metrology for production enviroments" European metrology research project, the laboratory carried out studies on helium leak standards and MSLD (Mass Spectrometer Leak Detector) stability measurements, time-dependent stability measurements of quadrupole mass spectrometer (QMS), one of the RGA (Residual Gas Analyzer) types, and the effects of instrument usage parameters on instrument sensitivity. The stability studies of the quadrupole mass spectrometer, which is used to determine gas purity in vacuum volumes and to observe vacuum conditions, were carried out on a dynamic vacuum system. (Figure 3)

Helium Leakage Standards Calibration Apparatus:

Calibrations of helium leak standards to determine gas flow rates are performed by comparison using reference leak standards and a commercial helium leak detector. (Image 4)

Environmental Parameters Must-Have Values Tolerances
Temperature 20.0 ºC ± 0.5 ºC
Relative Humidity 45 %rh ± 15 %rh

* Performance analysis and characterization of the constant pressure gas flow system (CPFM) at low gas flows (targeted operating range 4 x 10-12 mol/s - 4 x 10-7 mol/s) for gas flow rate determination measurements in vacuum at primary level.

MECHANICS GROUP

Projects and Collaborations

Projects Conducted by the Laboratory

  • TÜBİTAK UME Research Infrastructure Renovation and Development Project, Establishment of primary level "constant pressure flowmeter", 2017-2021
  • TÜBİTAK UME Research Infrastructure Renovation and Development Project, Renovation of existing primary level static expansion system, 2017-2020
  • European Union Project, 14IND06 pres2vac, "Industrial standards in the intermediate pressure-to-vacuum range", 2015-2018 (Contributed to the project through TÜBİTAK UME Pressure Laboratory)
  • Development consultancy service program for SASO/NMCC, Stage D-3.24: Installation of gas mixing system in accordance with gravimetric method, 2014-2015
  • G2BA-E1-01 Development of dynamic vacuum system (2013-2014)
  • G2BA-E1-02 Installation of manometric gas mixing system (2013-2014)
  • European Union Project, EMRPIND12 -Vacuum metrology for production enviroments, 2nd and 3rd packages; Task-3.4 leadership, 2011-2014
  • Installation of primary level multi-stage static expansion system, 1996-2000,

Future Work

  • Primary level gas flow rate measurements (in vacuum)
  • Primary level dynamic vacuum measurements
  • Extending the measurement range of vacuum systems

Laboratory Images

For more informationContact Us

Email: ume@tubitak.gov.tr

Phone: 0 (262) 679 5000